1200℃ three temperature zone CVD system

Model：KJ1200X-5-III-SF

Description：

KJ1200X-5-III-SF is a CE certified split 5" (O.D) three-zone tube furnace, which can achieve faster heating up to 1200oC and create a different thermal gradient by adjust three zone temperature. The furnace includes all accessories for immediate use. It

Introduction:
KJ1200X-5-III-SF is a CE certified split 5" (O.D) three-zone tube furnace, which can achieve faster heating up to 1200oC and create a different thermal gradient by adjust three zone temperature. The furnace includes all accessories for immediate use. It is an excellent furnace for annealing, diffusing and sintering sample in various atmospheres.

Technical parameters：

Furnace structure	· Double layer steel case with two cooling fan, which ensures low surface temperature. · Energy saving high purity fibrous alumina insulation. ·The surface of the inner furnace is coated with a high-temperature alumina coating imported from the United States, which can improve the heating efficiency of the equipment and also extend the service life of the furnace · One flange is supported by sliding rail to make sample loading /unloading easy, and another seal flange is installed with a digital vacuum gauge. One Double Steps Rotary Vane High Speed Vacuum Pump (240 L/m) with Oil is included.
Max. Temperature	1200°C
Continuous Temperature	1100°C
Max. Heating Rate	≤20°C /min
Tube Size and Flange	125 mm O.D * 120 mm ID. * 1400 mm fused quartz tube included. Vacuum flanges with valves and pressure gauge are included.
Heating Zone Length	Three zones: (900mm, 36" in total) · Zone 1: 229mm (9") · Zone 2: 457mm (18.0") · Zone 3: 229 mm (9")
Constant Temp. Zone	· If set three zone at same temperature, constant temperature zone is 25" (625 mm) length within ±1°C. If using one zone (center zone), constant temperature zone is 4.3" (110 mm) length within ±1°C.
Temperature Controllers	· Three Digital Controllers, and each has 30-segement Built in protection from over-heated and broken thermo couple
Temperature Accuracy	±1°C
Heating Element	Fe-Cr-Al Alloy doped by Mo
Mobile Cart & Flow meters	Gas mixing controls with three floating meters(range: 0-100 ml/min, 0-160 ml/min, 0-250 ml/min) are installed on one cart that allows three types of gases to operate during heating treatment. Two mobile carts are included to allow flange sliding onthe table Optional: for precision gas control, you may choose digital mass flow Control system instaed of float-meter at extra cost